Development and Characterization of Resource-saving Doping Processes for Industrial Silicon Solar Cells</a>

Development and Characterization of Resource-saving Doping Processes for Industrial Silicon Solar Cells

In this dissertation, high throughput approaches for diffusion and oxidation processes for silicon solar cell manufacturing are investigated. The focus lies on developing sustainable processes or process combinations for PERC and TOPCon solar cells which enable higher throughputs and reduced energy consumption than state-of-the-art processes at comparable energy conversion efficiency level.